Presentation Information

[25p-31B-4]Self-Assembling Formation of Si-QDs on SiO2 Line Patterns -SiO2 Line and Space Pattern Dependence

〇(M1)Jongeun Baek1, Ryoya Tsuji1, Yuki Imai1, Katsunori Makihara1, Seiichi Miyazaki1 (1.Nagoya Univ.)

Keywords:

quantum dot,LPCVD,Self-Assembling