Presentation Information
[25p-31B-4]Self-Assembling Formation of Si-QDs on SiO2 Line Patterns -SiO2 Line and Space Pattern Dependence
〇(M1)Jongeun Baek1, Ryoya Tsuji1, Yuki Imai1, Katsunori Makihara1, Seiichi Miyazaki1 (1.Nagoya Univ.)
Keywords:
quantum dot,LPCVD,Self-Assembling