[10a-N105-1~9] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)

[10a-N105-6] Evaluation of impurities in Ga₂O₃ thin films by IR and Raman spectroscopy

〇(P)Shun Ukita¹, Hironori Okumura¹ (1.Univ. Tsukuba)

Keywords:

Gallium oxide