[10a-N204-1~10] 9.3 Nanoelectronics

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[10a-N204-8] Machine Learning Model for Non-destructive Characterization of Embedded Nano-structures in Si MOSFET

〇(D)Renxiang Lyu¹, Hyoto Yamaguchi¹, Seiya Kasai¹ (1.RCIQE, Hokkaido Univ.)

Keywords:

Machine Learning,Si MOSFET,Nano-structures