Presentation Information
[10a-N323-10]Energy distribution analysis of laser-induced fluorescence in the deposition region for neutral Ti particles produced by deep oscillation magnetron sputtering
〇(M2)Yuki Nakagawa1, Hiroki Kobayashi1, Eisuke yokoyama1,2, Nobuo Nishimiya1, Masaomi Sanekata1, Masahide Tona3, Hiroaki Yamamoto3, Keizo Tsukamoto3, Kiyokazu Fuke4, Keijiro Ohshimo5, Fuminori Misaizu6 (1.Tokyo Polytech. Univ., 2.Salesian Polytech., 3.Ayabo Corp., 4.Kobe Univ., 5.Hokkaido Univ. of Edu., 6.Tohoku Univ.)
Keywords:
laser-induced fluorescence,deep oscillation magnetron sputtering
High power pulsed magnetron sputtering (HPPMS) plasmas contain neutral/ionic particles and those light emitting/non-emitting particles. Various spectroscopic techniques, which are optical emission spectroscopy (OES) for light emitting particles, laser-induced fluorescence (LIF) spectroscopy for light non-emitting particles, laser absorption spectroscopy for light emitting/non-emitting particles, and mass spectrometry for charged particles, are used as the plasma diagnostics for the particles included in HPPMS plasma.
The time-evolution of the LIF shows peaks corresponding to the DOMS discharge of pulse and long tail during the pulse. This is attributed to the velocity distribution of neutral Ti particles generated by pulse discharge of DOMS in the deposition region. The velocity and energy distributions obtained from the time-evolution of LIF can be optimized by the Shifted Maxwellian distribution. In the present study, energy distributions were analysis for metastable neutral particles based on time-evolved LIF measurements of neutral Ti particles reaching the DOMS deposition region.
The time-evolution of the LIF shows peaks corresponding to the DOMS discharge of pulse and long tail during the pulse. This is attributed to the velocity distribution of neutral Ti particles generated by pulse discharge of DOMS in the deposition region. The velocity and energy distributions obtained from the time-evolution of LIF can be optimized by the Shifted Maxwellian distribution. In the present study, energy distributions were analysis for metastable neutral particles based on time-evolved LIF measurements of neutral Ti particles reaching the DOMS deposition region.