[10a-N323-1~11] 8.1 Plasma production and diagnostics | The 86th JSAP Autumn Meeting 2025

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Oral presentation8 Plasma Electronics : 8.1 Plasma production and diagnostics

[10a-N323-1~11]8.1 Plasma production and diagnostics

Wed. Sep 10, 2025 9:00 AM - 12:00 PM JST
Wed. Sep 10, 2025 12:00 AM - 3:00 AM UTC

N323 (Lecture Hall North)

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[10a-N323-1]Investigation of Plasma Control Using Rectangular Amplitude-Modulated Discharges: Simulations and Experiments

〇KUNIHIRO KAMATAKI¹, Yushi Sato¹, Yousei Kurosaki¹, Tsukasa Masamato¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naho Itagaki¹, Kazunori Koga¹, Masaharu Shiratani¹ (1.Kyushu Univ.)

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-N323-2]Generation of uniform plasma by an auxiliary electrode.

〇Yudai Suzuki¹, Petros Abraha¹ (1.Meijo Univ.)

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[10a-N323-3]Research on the control of the behavior of levitating microparticles in plasma

〇TIANXIANG WANG¹, D Hiro¹, M Inoue¹, T Taguchi², Y Oda¹, S Park¹ (1.Setsunan Univ, 2.Japan Atomic Energy Agency)

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[10a-N323-4]Spatially resolved measurements of reduced-pressure oxygen ICP by tomographic
emission spectroscopy

Wentao He¹, Tetsuji Kiyota², Kenta Doi², Hirotoshi Nakao², Tomomitsu Ozeki², Kazuhiro Naiki¹, Kangbai Li¹, Shun-ichiro Ohmi¹, 〇Hiroshi Akatsuka^3,1 (1.Sch. Eng. Sci. Tokyo, 2.ULVAC, 3.IIR Sci. Tokyo)

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[10a-N323-5]Spatially averaged spectroscopic measurements of low-pressure argon plasmas and their relationship to local electron temperature and density

〇Koki Fukumoto¹, Kenta Doi², Tetsuji Kiyota², Yuya Yamashita¹, Wataru Kikuchi¹, Atsushi Nezu¹, Hiroshi Akatsuka¹ (1.Science Tokyo, 2.ULVAC)

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-N323-6]Prediction of the Electron Energy Distribution Function from Argon Optical Emission Spectra
Using a Collisional-Radiative Model

〇(M2)Joichiro Mieda¹, Simon Chouteau¹, Fatima Arellano¹, Marton Gyulai^2,3, Zoltan Donko^1,2, Peter Hartmann², Tsanko Tsankov^1,4, Uwe Czarnetzki⁴, Hamaguchi Satoshi¹ (1.Osaka Univ., 2.Wigner Research Centre for Physics, 3.Eotvos Lorand Univ., 4.Institute for Plasma and Atomic Physics)

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-N323-7]Rotational and vibrational temperatures diagnostics determined on N₂ second positive system in nitrogen plasma generated by plasma-enhanced metal-organic chemical vapor deposition system

〇Yuya Yamashita¹, Tokio Takahashi¹, Tetsuji Shimizu¹, Hisashi Yamada¹ (1.AIST)

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[10a-N323-8]Monte Carlo Simulation of Fast Neutrals impinging on Substrate

〇Kazuki Denpoh¹, Masaaki Matsukuma¹ (1.Tokyo Electron Technology Solutions)

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[10a-N323-9]Real-time Analysis of Neutral species spectrum Using Machine Learning (2)

〇(M2)Kotaro Takahashi¹, Yusuke Ando¹, Takayoshi Tsutsumi², Kenichi Inoue², Makoto Sekine², Kenji Ishikawa² (1.Nagoya University, 2.Nagoya Univ. Center for Low-temperature Plasma Sciences)

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-N323-10]Energy distribution analysis of laser-induced fluorescence in the deposition region for neutral Ti particles produced by deep oscillation magnetron sputtering

〇(M2)Yuki Nakagawa¹, Hiroki Kobayashi¹, Eisuke yokoyama^1,2, Nobuo Nishimiya¹, Masaomi Sanekata¹, Masahide Tona³, Hiroaki Yamamoto³, Keizo Tsukamoto³, Kiyokazu Fuke⁴, Keijiro Ohshimo⁵, Fuminori Misaizu⁶ (1.Tokyo Polytech. Univ., 2.Salesian Polytech., 3.Ayabo Corp., 4.Kobe Univ., 5.Hokkaido Univ. of Edu., 6.Tohoku Univ.)

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-N323-11]Effect of Oxygen Addition to Inductively Coupled Nitrogen/Water Vapor Plasma for Ammonia Synthesis

〇(D)Kyohei Kita¹, Yoshinobu Inagaki¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

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