[10a-N403-1~10] 7.1 X-ray technologies

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[10a-N403-2] Development of flat-field spherical laminar-type varied-line-spacing diffraction grating coated with soft X-ray multilayer to attain high-diffraction-efficiency

〇Masato Koike^1,2,3, Tadashi Hatano², Alexander Pirozhkov¹, Masami Terauchi² (1.QST, 2.Tohoku Univ., 3.Osaka Metro.Univ.)

Keywords:

diffraction grating,soft x-ray,multilayer

We fabricated a flat-field spherical laminar-type diffraction grating with varied-line-spacing grooves and soft X-ray multilayer that exhibits high diffraction efficiency in the 1-2 keV region according to the design reported previously [1], and reported the evaluation of the diffraction efficiency.
[1] Koike et al., 69th Spring Meeting of the Japan Society of Applied Physics, 24a-E101-1 (2022).