[10a-N403-1~10] 7.1 X-ray technologies

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-N403-6] Observation of Silver Nanoparticles Using a Transmission EUV Microscope and Transmission Simulation

〇(P)Shun Uji¹, S. Maidul Haque¹, Mitsunori Toyoda¹ (1.Tokyo Polytechnic Univ.)

Keywords:

Extreme Ultra Violet,EUV Microscopy,Nanoparticle

EUV microscopes are expected to be the next-generation optical microscopes, offering high spatial resolution of several tens of nanometers and achieving large absorption cross sections and high contrast by selecting wavelengths at inner shell absorption edges. In this study, we focused on silver nanoparticles, which have been reported to have various shapes. We compared and analyzed transmission simulations and conventional nanoscale observation methods to clarify their EUV observation characteristics. By fitting the calculated transmission rates of EUV observation images, we obtained results indicating that the sample thickness can be estimated to be approximately 1/10 of the depth of focus.