[10a-N405-1~8] 11.5 Junction and circuit fabrication process, digital applications

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[10a-N405-7] Study on controlling the fluorination reactivity of native Nb oxide to improve the Q factor of superconducting resonators

〇(M2)Yamato Aoyama¹, Daisuke Ohori¹, Yuichi Fujita², Yoshiro Urade², Go Fujii², Kunihiro Inomata², Kazuhiko Endo¹ (1.IFS, Tohoku Univ., 2.AIST)

Keywords:

Niobium,fluorination,dry process