Presentation Information

[10a-P05-5]Fabrication and characterization of recessed gateless UV sensor using an AlGaN/GaN heterostructure

〇Sho Shirasu1, Ren Morita1, Hiroshi Fujioka2, Narihiko Maeda1 (1.Tokyo Univ. of Technology, 2.Inst. of Industrial Science, Univ. of Tokyo)

Keywords:

AlGaN/GaN heterostructure