Presentation Information
[10p-N105-12]Evaluation of the applicability of the LACBED method to structural analysis of dislocations introduced in β-Ga2O3
〇Yoshihiro Sugawara1, Yongzhao Yao2,1, Kohei Sasaki3, Yukari Ishikawa1 (1.JFCC, 2.Mie Univ., 3.NCT, Inc.)
Keywords:
gallium oxide,Burgers vector,LACBED
In monoclinic gallium oxide (β-Ga2O3), which cannot be handled using a Cartesian coordinate system, it is difficult to elucidate the structure of dislocations formed within the crystal using the weak-beam dark-field (WBDF) method. On the other hand, the large-angle convergent-beam electron diffraction (LACBED) method is a useful technique that can uniquely determine the Burgers vector (both direction and magnitude) of a dislocation. In this study, the applicability of the LACBED method was examined in order to determine the Burgers vectors of dislocations formed in β-Ga2O3.