[10p-N401-1~7] 13.3 Insulator technology

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[10p-N401-6] Preparation and evaluation of GeO₂/Ge structure using CVD method.

〇Takumi Suzuki¹, Hiroki Inoue¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo Univ. Agri. & Tech.)

Keywords:

CVD