[10p-N403-1~11] 7.3 Micro/Nano patterning and fabrication

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[10p-N403-1] Research on Resolution of Rough Patterns Printed by Projection Lithography Using Faced Paraboloid Mirrors

〇Toshiyuki Horiuchi¹, Jun-ya Iwasaki¹, Hiroshi Kobayashi¹ (1.Tokyo Denki Univ.)

Keywords:

projection lithography,rotary paraboloid mirror,resolution

Resolution and its decisive factors of projection lithography using optics composed of a pair of faced rotary paraboloid mirrors were investigated. It is aimed to print large patterns withs widths of 50-500 μm on arbitrarily but gently curved object surfaces simply and inexpensively. The optics has aberrations, and light rays from a point on the reticle don’t gather to an image point, because the arrival points slightly shift depending on the ray routes. For this reason, the pattern images are blurred when parts of illumination light rays are inclined from the normally collimated light rays. So, it was thought that the extent of the blur decided the resolution of the optics. Therefore, the blurs were calculated, and the resolution was inferred. It was considered that the actual resolution almost coincided with the inference.