[7a-N206-1~10] 9.2 Nanoparticles, Nanowires and Nanosheets

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[7a-N206-10] A High-Yield, Low-Variability Pt Nanosheet Hydrogen Sensor Enabled by a TiN Adhesion Layer

〇(M1)Shumei Ui¹, Uchida Ken¹, Toyosima Ryo¹ (1.Tokyo Univ.)

Keywords:

Metal nanosheet,Gas sensor

Molecular sensing by metal nanosheets (NS) is expected to be applied to all aspects of society. In the past, we have developed a PtNS sensor capable of detecting hydrogen in exhaled breath without being affected by humidity. The sensor variation suppression by annealing could not be used because of the poor adhesion of PtNS on SiO₂, which leads to a decrease in the sensor yield after annealing. In this study, this problem was overcome by inserting a TiN adhesion layer between Pt and SiO₂, and a PtNS sensor with both high yield and low sensor variation was successfully fabricated.