Presentation Information
[7a-N221-2]Pipe diameter dependence of Si spherical nanoparticles deposited by pulsed laser ablation method with pipe and gas flow
〇Yutsuki Hanada1, Tamao Aoki1, Ikurou Umezu1 (1.Konan Univ.)
Keywords:
pulsed laser ablation method,spherical nanoparticles,inertial effect
By using a pipe and gas flow during the PLA method in the background gas, spherical nanoparticles are deposited on the substrate. The mean diameter can be controlled by varying the gas velocity. When the pipe diameter was varied to change the deposited area on the substrate, the deposited area increased with the pipe diameter. When the pipe diameter was less than φ3.5, the average particle size agreed well with the calculated value based on the inertia effect, but when φ5.0 is used, it is smaller than the calculated value. This may be due to the effect of the radius of curvature of the gas just before the substrate.