[7a-N321-1~8] 3.8 Terahertz technologies

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[7a-N321-3] Analysis of anisotropic surface conduction thin films by terahertz ellipsometry

〇Akihiro Okamoto¹, Masaya Nagai¹, Masaaki Ashida¹, Takashi Fujii² (1.Grad. Sch. of Eng. Sci., Osaka Univ, 2.Nippo Precision Co., Ltd)

Keywords:

semiconductor,Ellipsometry,Terahertz

In this presentation, we use terahertz magneto-optical ellipsometry to collect experimental data on a gallium arsenide (GaAs) thin film. For the analysis, we apply an improved surface conductivity model, treating the thin film's dielectric response as a surface current flowing on the substrate. This enables the complex reflectance to be expressed concisely as a function of surface conductivity. We demonstrate that the results obtained using the improved model are consistent with those from the conventional 4×4 matrix method. Based on this agreement, we validate the proposed model and discuss its potential applications.