Presentation Information

[7a-N321-5]Effect of Silicon Nanowire Moth-Eye Structures on Millimeter-Wave Reflectance Reduction

〇(M1C)Koki Shirakawa1, Yoshiki Sugimoto1, Shinya Kato1 (1.Nagoya Institute of Technology)

Keywords:

Silicon Nonowire,Silicon antenna lens

Silicon nanowire (SiNW) structures were formed on high-permittivity silicon wafers using metal-assisted chemical etching, achieving significant reflectance reduction in the millimeter-wave band. The pseudo-moth-eye structure enabled impedance matching at the air-silicon interface, reducing reflectance from 33% to as low as 3%. The relationship between reflectance and SiNW volume fraction was also clarified. Future work will focus on applications to curved lenses.