[7a-S103-1~7] Atomic Layer Process (ALP) analysis and application technologies (2)

10:05 AM - 10:35 AM JST(1:05 AM - 1:35 AM UTC)English Presentation

[7a-S103-2] 20 Years of the Korea ALD Workshop: History and Development

〇Hyeongtag Jeon¹ (1.Hanyang University)

Keywords:

ALD