[7a-S103-1~7] Atomic Layer Process (ALP) analysis and application technologies (2) | The 86th JSAP Autumn Meeting 2025

Session Details

Symposium (Oral)Symposium : Atomic Layer Process (ALP) analysis and application technologies (2)

Sun. Sep 7, 2025 10:00 AM - 12:05 PM JST
Sun. Sep 7, 2025 1:00 AM - 3:05 AM UTC

S103 (Lecture Hall South)

Sponsor

10:00 AM - 10:05 AM JST(1:00 AM - 1:05 AM UTC)

〇Yukihiro Shimogaki¹ (1.The Univ. Tokyo)

10:05 AM - 10:35 AM JST(1:05 AM - 1:35 AM UTC)English Presentation

〇Hyeongtag Jeon¹ (1.Hanyang University)

10:35 AM - 11:05 AM JST(1:35 AM - 2:05 AM UTC)

〇Hirokazu Kyokane¹ (1.Tokyo Electron Technology Solutions Ltd.)

11:05 AM - 11:20 AM JST(2:05 AM - 2:20 AM UTC)

〇Naoki Tamaoki¹, Jun Yamaguchi¹, Noboru Sato¹, Atsuhiro Tsukune¹, Yukihiro Shimogaki¹ (1.The Univ. Tokyo)

11:20 AM - 11:35 AM JST(2:20 AM - 2:35 AM UTC)English Presentation

〇(M2)Yichen ZOU¹, Yuxuan Wu¹, Jun Yamaguchi¹, Noboru Sato¹, Atsuhiro Tsukune¹, Yukihiro Shimogaki¹ (1.The Univ. Tokyo)

11:35 AM - 11:50 AM JST(2:35 AM - 2:50 AM UTC)

〇Shogo Shimada¹, Mitsuhiro Hakamatsuka¹, Atshushi Sano¹, Shinaya Hattori¹, Satoshi Yabu¹, Hajime Karasawa¹ (1.KOKUSAI ELECTRIC)

11:50 AM - 12:05 PM JST(2:50 AM - 3:05 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

〇(D)Yuuki Tsuchiizu¹, Teruhisa Otsuka², Yamazaki Masashi², Ohori Daisuke¹, Endo Kazuhiko¹ (1.Tohoku Univ., 2.Natl. Inst. of Adv. Ind. Sci. and Tech.)