Presentation Information
[7p-N202-12]Structural analysis of SiO2 optical thin films fabricated by sputtering and electron beam evaporation
〇Weixin Ma1, Yuhang Yang1, Kota Morikawa1, Naoya Tajima1, Takayuki Matsudaira2, Hiroshi Murotani1 (1.Tokai Univ., 2.Shincron Co., Ltd.)
Keywords:
optical thin film,slicon dioxide