Presentation Information

[7p-N202-13]Low Refractive Index SiO2 Optical Thin Film Deposited by Sputtering and Electron Beam Evaporation part 4

〇kota morikawa1, tajima naoya1, matsudaira takayuki2, murotani hiroshi1 (1.Graduate School of Eng., Tokai Univ., 2.SHINCRON CO.LTD.)

Keywords:

optical thin fim,slicon dioxide,mechanical property