Presentation Information
[7p-N202-2]Construction of Combinatorial Experiments for Multinary Nitride Epitaxial Thin Films
〇Takuto Soma1, Kohei Yoshimatsu1, Akira Ohtomo1 (1.Science Tokyo)
Keywords:
nitrides,sputtering,combinatorial
Nitride compounds are one of the important material groups in ceramics, but the high equilibrium vapor pressure of nitrogen generally makes the synthesis of sintered samples and single crystals difficult. Therefore, there is a historical background of investigating detailed electronic properties by fabricating nitrides in the form of thin films using epitaxial techniques. In recent years, various new phases and functionalities have been predicted in multinary nitrides, but the experimental efficiency for material exploration remains low due to the difficulty of synthesis. Furthermore, there are extremely few examples of epitaxial thin films of multinary nitrides, and their electronic properties are largely unexplored. To overcome this situation, we have applied the combinatorial synthesis method, which has been developed for multinary oxides, to multinary nitrides. To synthesize multinary nitrides with high crystallinity and high throughput, we have constructed an experimental system based on an ultra-high vacuum, high-temperature multi-sputtering system with program-controlled thin film growth.