[7p-N305-1~18] 12.7 Biomedical Engineering and Biochips

6:15 PM - 6:30 PM JST(9:15 AM - 9:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[7p-N305-18] CMOS-Graphene Integrated Molecular Sensor Array

〇Kosuke Sato¹, Masato Saito¹, Yasufumi Yokoshiki², Takeshi Watanabe², Shinji Koh², Takashi Tokuda¹ (1.Science Tokyo Inst., 2.Aoyama Gakuin Univ.)

Keywords:

graphene,biosensor

Graphene is a two-dimensional material consisting of carbon bonded in a honeycomb shape. It is attracting attention as a high-performance sensor material because it shows sensitive property changes to the external environment and adsorbed substances, and can be chemically modified to give molecular selectivity.We are aiming to realize a CMOS-graphene integrated sensor with high functionality by transferring graphene formed by CVD onto a CMOS chip.In this report, we report on the design and evaluation of a graphene sensor array.