Presentation Information

[8a-N206-12]Application of quartz length-extension-resonator to high-speed scanning in AFM

〇(B)Mihiro Imakita1, Yuji Miyato1, Hirofumi Yamada2 (1.Ryukoku Univ, 2.Ctr Ryukoku Univ)

Keywords:

AFM,LER,high-speed

In this study, we developed a novel high-speed atomic force microscope (HS-AFM) using a quartz length-extension resonator (LER) with a resonance frequency of approximately 1 MHz. Despite its high spring constant, the LER sensor enables a simplified system due to its self-sensing capability and maintains a high Q factor in ambient conditions, allowing for sensitive distance control. Imaging of a 5µm square area at 10sec/frame was achieved, demonstrating potential for future applications in liquid environments and the observation of ice crystal growth.