Presentation Information

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8a-N221-6]Enhancement of Piezoelectric Properties by Laser Microfabrication

〇Hiumi Terashima¹, Jundong Song^2,3, Naoki Shibao², Shingo Ono¹, Takashi Harumoto³, Ji Shi³, Takashi Nakajima², Soichiro Okamura² (1.Nagoya Tech, 2.Tokyo Univ. of Sci., 3.Science Tokyo)

Keywords:

Femtosecond laser processing,Piezoelectric thin films

Piezoelectric materials with electromechanical conversion effects are used in sensors and actuators. In particular, piezoelectric thin films are frequently used in MEMS; however, their piezoelectric response is degraded due to deformation constraints by the substrate. To address this challenge, microstructuring methods have been investigated to reduce the constraint. In this study, we propose a laser processing technique to create microstructures over a large area, thereby enhancing the piezoelectric response.

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