[8a-N321-1~9] 6.2 Carbon-based thin films

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8a-N321-1] Cathode Spot Driving and Discharge Stability in High-Rate Filtered Arc Deposition System for DLC Film Preparation

〇Genki Sano¹, Haru Sano¹, Seiya Watanabe¹, Hirofumi Takikawa¹, Hiroaki Sugita², Takahiro Hattori², Hiroki Gima² (1.Toyohashi Univ. Technol., 2.OSG Corp.)

Keywords:

Diamond-Like Carbon,ta-C,cathode spot driving

The ta-C film is deposited using vacuum arc deposition. We are currently developing and improving an HR-FAD system equipped with a coiled anode. This system has a major issue with discharge instability, particularly the deviation of the cathode spot. In the past, we achieved some success by applying a magnetic field, but further stabilization was needed. In this study, we strengthened the magnetic field of the outer electromagnet. As a result, the number of self-extinction was reduced and discharge stabilization was achieved. We consider that this occurred because the cathode spot’s driving position shifted inward, thereby suppressing its deviation from the discharge area.