[8a-N321-1~9] 6.2 Carbon-based thin films

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[8a-N321-2] Hydrogen-Free DLC Film Preparation on Practical Worktable in High-Rate Filtered-Arc Deposition System

〇Haru Sano¹, Genki Sano¹, Seiya Watanabe¹, Hirofumi Takikawa¹, Hiroaki Sugita², Takahiro Hattori², Hiroki Gima² (1.Toyohashi Univ. Technol., 2.OSG Corp.)

Keywords:

ta-C,hydrogen-free DLC,High-rate filtered arc deposition

DLC coating is used to improve the anti-adhesion and wear resistance of cutting tools. In this study, we attempted DLC film preparation on a practical worktable using our developed High-Rate Filtered Arc Deposition system. While conventional deposition on a non-rotating plate post resulted in a-C film with an I_D/I_G of 0.57 and a film thickness of 700 nm, deposition at the drill holder position yielded ta-C film with an I_D/I_G of 0.19 and a film thickness of 370 nm. We attributed enabling the formation of ta-C to the reduced deposition rate preventing overheating.