[8a-N321-1~9] 6.2 Carbon-based thin films

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[8a-N321-4] Increase in the surface layer thickness in DLC films due to heat accumulation

〇Yuji Muraoka¹, Sho Enomoto², Qiang Yue³, Takayoshi Yokoya¹, Hiroyuki Okazaki⁴ (1.RIIS. Okayama Univ., 2.ELST. Okayama Univ., 3.NST. Okayama Univ., 4.QST)

Keywords:

DLC,Surface layer,heat accumulation

The key factor of the increase in the surface layer of diamond-like carbon was investigated using Raman spectroscopy, photoelectron spectroscopy, and molecular dynamics simulation. Consequently, the temperature increase due to heat accumulation within the film is an importnt factor for the increase in the surface layer in DLC films.