[8a-N402-1~12] 3.7 Optical measurement, instrumentation, and sensor

12:00 PM - 12:15 PM JST(3:00 AM - 3:15 AM UTC)

[8a-N402-12] Enhancing spatial resolution in SRS imaging of high-refractive-index samples using a solid immersion lens

〇Yuki Sano¹, Hiroyuki Omiya², Takashi Takahashi², Yasuyuki Ozeki¹ (1.Univ. Tokyo, 2.Tokyo Electron)

Keywords:

Stimulated Raman scattering microscopy,silicon,solid immersion lens

Stimulated Raman scattering (SRS) microscopy is a powerful technique for high-speed visualization of molecular and lattice vibrations. However, measuring silicon has been difficult due to its strong optical absorption. The authors developed an SRS microscopy method using light sources in the optical communication wavelength range to visualize strain inside silicon. Nevertheless, in high-refractive-index materials like silicon, the refractive index mismatch with air causes a reduction in spatial resolution. To overcome this limitation, the present study introduces a solid immersion lens to achieve high-resolution imaging.