Presentation Information

[8a-P05-19]Impact of Gas Species in Cu3N Growth by Mist CVD

〇(M1)Kouki Wakui1, Naoki Sugita1, Kazuyo Omura2, Chisato Tsukioka1, Hiroki Nagai1, Takeyoshi Onuma1, Tohru Honda1, Tomohiro Yamaguchi1 (1.Kogakuin Univ., 2.Tohoku Univ.)

Keywords:

Cu3N,Mist CVD