Presentation Information

[8a-P05-4]Crystal growth of Yttrium Oxide on Carbon Substrates

〇Mahiro Ushida1, Satoshi Torimi2, Takahiro Morisita2, Isao Takahashi3, Kentaro Kaneko3,4 (1.Ritsumeikan Univ., 2.TOYO TANSO, 3.ROST Ritsumeikan, 4.RISA)

Keywords:

semiconductor,Oxide Thin Film,mist CVD