Presentation Information
[8a-P05-5]Epitaxial Growth and Characterization of Lightly Cr-Doped ITO Films
〇Ayano Soga1, Takumi Kado1, Toshihiro Nakamura1,2 (1.Kyoto Univ., 2.ILAS, Kyoto Univ.)
Keywords:
transparent conductive film,diluted magnetic semiconductor,epitaxial film
Diluted magnetic semiconductors have attracted much attention due to their potential applications in spintronic devices. Dilute magnetic semiconductors based on oxides are expected to be put to practical use because of their high Curie temperature. In this study, we investigated the effect of lightly Cr doping on structural, electrical, optical, and magnetic properties of Cr-doped indium tin oxide (ITO) films. Epitaxial Cr-doped ITO films with different Cr concentrations were deposited on single-crystal yttria-stabilized zirconia substrates by RF magnetron sputtering. The lightly Cr-doped ITO films exhibited lower electrical resistivity than undoped ITO films. A lightly Cr doping in the epitaxial Cr-doped ITO films leads to high crystallinity, high electrical conductivity, high visible transparency, and high-temperature ferromagnetism, which are desirable traits for transparent ferromagnetic electrodes in opto-spintronic devices.