Presentation Information
[8a-P06-2]Thickness-Dependent Through-Hole Via Resistance in Solid-State Gold Nanopore Membranes
〇Yoh Onozawa1, Yoshimasa Hiiro1, Seiichiro Izawa1, Yutaka Majima1 (1.Science Tokyo)
Keywords:
nanopore,DNA sequencer,Microfabrication Technology
Our group is developing a DNA sequencer with solid gold nanopores using ELGP technology to overcome the issues of existing long-lead DNA sequencers, such as robustness. In order to measure the resistance change during DNA passage with high sensitivity, the resistance at the through-hole vias must be reduced since they are not constrictions. The aim of this research is to reduce the resistance of the through-hole via. In this study, I examine the dependence of via resistance on membrane thickness since the membrane was thinned to reduce resistance.