Presentation Information

[8p-N302-14]Highly Controlled Nb Post-Doping into WSe2 via the Intermittent Flux Method

〇Itsuki Tanaka1, Tomonori Nishimura1, Kaito Kanahashi1, Naoshi Kakeya2, Kohei Aso2, Yoshifumi Oshima2, Kosuke Nagashio1 (1.UTokyo, 2.JAIST)

Keywords:

two-dimensional material,TMDC,doping

TMDCs, which are the promising materials for next generation logic semiconductors, require high-level substitutional doping to reduce the contact resistance. However, reports of substitutional doping of TMDCs remain limited. In this session, we suppose the highly controlled Nb post doping toward WSe2 via the intermittent flux method.