[8p-N403-1~15] CS.1 Code-sharing Session of 2.3&7.4

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[8p-N403-3] Proof-of-principle study for enhancing the sensitivity of X-ray PEEM for solid–liquid interface observation – Application of GCIB-thinned SiNx membranes –

〇Masaya Takeuchi¹, Satoru Suzuki², Noriaki Toyoda¹ (1.Univ. of Hyogo, 2.LASTI, Univ. of Hyogo)

Keywords:

Gas cluster ion beam,Silicon nitride,PEEM

This study aims to demonstrate the principle of high-sensitivity observation using X-ray photoemission electron microscopy (X-ray PEEM) with ultra-thinned silicon nitride (SiNx) membranes processed by gas cluster ion beams (GCIB). The work is intended for liquid-sample observation using a liquid cell. We have successfully observed pure water using a SiNx membrane with 9-nm thickenss. Future work will combine GCIB-based thinning with PEEM to further enhance detection sensitivity.