Presentation Information

[8p-N406-2]Development and Implementation of a Scanning Electron Microscope Training Program of Semiconductor Education for KOSEN Students

〇Risako Taguchi1, Shigetaka Katori1 (1.NIT Tsuyama)

Keywords:

semiconductor,education,KOSEN

An experimental training program utilizing the scanning electron microscope (SEM) was developed and implemented for third-year students of the Department of Electrical and Electronic Systems. The program was designed to promote the acquisition of practical skills, including equipment operation, while increasing students' motivation to learn about the semiconductor field and cultivating their perspectives as researchers. The content of the program was designed to investigate the relationship between material properties and surface conditions using samples such as organic semiconductor thin films. Students had comprehensive experience from sample preparation, SEM operation and observation, to data analysis.