[8p-P01-1~65] 1 Interdisciplinary Physics and Related Areas of Science and Technology (Poster)

[8p-P01-18] Construction of Semiconductor Education by Practical Microfabrication at Gifu Kosen

〇Hitoe Habuchi¹, Tetsuya Fukunaga¹, Tamio Iida¹, Eiji Shiraki¹ (1.NIT, Gifu College)

Keywords:

Semiconductor Education,Microfabrication,maskless photolithography

The National Institute of Technology (Kosen) has been promoting the development of human resources for semiconductors as the COMPASS 5.0 project. Our group is planning to develop practical semiconductor education at Gifu Kosen under the research theme of “Establishment and Approach to Spread Semiconductor Education by Practical Microfabrication at National Institute of Technology,” which was adopted as Grant-in-Aid for Scientific Research (C). In this presentation, we will give an overview of our effort and introduce specific practical examples.