Presentation Information
[8p-P01-65]Improvement in piezoelectricity of c-axis parallel oriented ZnO films using positive ion irradiation to substrate by DC bias sputtering
〇YUYA YOSHIDA1, Shinji Takayanagi1, Takahiko Yanagitani2 (1.Doshisha Univ., 2.Waseda Univ.)
Keywords:
ZnO,Sputtering method,Shear horizontal acoustic wave