Presentation Information

[8p-P01-65]Improvement in piezoelectricity of c-axis parallel oriented ZnO films using positive ion irradiation to substrate by DC bias sputtering

〇YUYA YOSHIDA1, Shinji Takayanagi1, Takahiko Yanagitani2 (1.Doshisha Univ., 2.Waseda Univ.)

Keywords:

ZnO,Sputtering method,Shear horizontal acoustic wave