Presentation Information
[8p-P09-4]Microstructural Analysis of HfO2/ZrO2 Nanolaminate Thin Films
〇(M1)Ryu Kawamura1, Sato Yukio1 (1.Kumamoto Univ.)
Keywords:
Hafnium Oxide,Nanolaminate Thin Films,Scanning Transmission Electron Microscopy
The crystal phases of nanolaminate thin films, composed of alternating layers of HfO2 and ZrO2 repeated three times, were analyzed using scanning transmission electron microscopy (STEM) and electron energy-loss spectroscopy (EELS). To minimize errors in the measured lattice spacings, distortions in the STEM images were corrected through image averaging and a two-step affine transformation. Analysis of the lattice plane spacings and the O-K edge EELS peak shapes suggested the presence of different crystal phases on the top and bottom sides of the film.