Presentation Information
[9a-N201-4]Growth of ferroelectric thin films under atmospheric pressure below 100 ºC and their characterization
〇Satsuki Koga1, Yuxian Hu1, Takahisa Shiraishi2, Kazuki Okamoto1, Hiroshi Funakubo1 (1.Science Tokyo, 2.Kumamoto Univ.)
Keywords:
ferroelectric,thin film,low-temperature deposition
We successfully fabricated PbTiO3(100)-oriented epitaxial films under atmospheric pressure and 40°C using powder raw materials and strong alkaline solutions as starting materials. Compared to conventional synthesis methods, this method is extremely simple and enables synthesis at atmospheric pressure and low temperatures. However, the details of the film formation process remain unclear. In this study, we investigated the film formation process in greater detail and examined the mechanisms that enable low-temperature film formation.