Presentation Information
[9a-N206-3]Optical Resonant Modes in Tensile-Strained Ge Microdisks Fabricated via Laser-Induced Liquid-Phase Crystallization
〇(M1)Liji Zhan1, Tianping Li1, Yuta Hayakawa2, Takuma Kobayashi2, Heiji Watanabe2, Takayoshi Shimura1,2 (1.Waseda Univ., 2.UOsaka)
Keywords:
silicon photonics,germanium,laser
Ge based lasers are expected to be key components of Si photonic integration technology, because they realize light sources compatible with Si-CMOS technology.
We have been developing laser-induced liquid-phase crystallization (LLPC) and shown the high quality of the tensile-strained Ge and GeSn layers fabricated by LLPC. In this paper we show the analysis of optical resonant modes observed from the tensile-strained Ge microdisks fabricated via LLPC.
We have been developing laser-induced liquid-phase crystallization (LLPC) and shown the high quality of the tensile-strained Ge and GeSn layers fabricated by LLPC. In this paper we show the analysis of optical resonant modes observed from the tensile-strained Ge microdisks fabricated via LLPC.