[9a-N403-1~11] 7.2 Applications and technologies of electron beams

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[9a-N403-10] Random Sampling of Emitted Electrons from an Electron Source

〇Ippo Kishida¹, Yasunari Sohda¹, Hidekazu Murata² (1.Univ. of Tsukuba, 2.Meijo Univ.)

Keywords:

electron source

To improve the resolution of scanning electron microscopes, reducing the virtual source size of the electron source is crucial. In this research, we have developed a random sampling method to determine the initial conditions (position, energy, and angle) of electrons in trajectory simulations using the Boundary Charge Method, which is employed to analyze optical aberrations caused by mechanical errors. By calculating the distributions of these physical quantities from the surface electric field of the electron source using the Fowler-Nordheim equation and other principles, the sampling results showed good agreement with the theoretical curves.