[9a-N403-1~11] 7.2 Applications and technologies of electron beams

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[9a-N403-3] Observation of insulator hole structure using a secondary electron detector of low-vacuum SEM

〇Yuanzhao Yao¹, Shuhei Shibuya¹, Takashi Sekiguchi¹ (1.Tsukuba Univ.)

Keywords:

secondary electron,low vacuum,Scanning Electron Microscope

We observed high-aspect-ratio deep hole structures in insulating resin using a UVD (Ultra Variable-pressure Detector) in low-vacuum scanning electron microscopy. The UVD images clearly capture the details inside the hole, whereas the backscattered electron images provided insufficient information. The image quality depended on conductivity of the hole sample and vacuum level, and under appropriate conditions, internal observation of holes with an aspect ratio greater than 10 was possible. Furthermore, a charging model was developed to investigate the mechanism by which image contrast varies with observation conditions.