[9a-N403-1~11] 7.2 Applications and technologies of electron beams

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[9a-N403-4] Fabrication of BSE Energy Filter and Construction of Bandpass BSE Image

〇Takashi Sekiguchi¹, Yuanzhao Yao¹, Yuto yanagihara², Kazuhiro Kumagai^1,3 (1.Univ. Tsukuba, 2.GPI, 3.AIST)

Keywords:

BSE,energy filter,SEM

We have been developing the high pass-energy filter for backscattering electrons (BSEs) in SEM. To overcome the threshold energy of 1 kV for bias grid, we have substituted it with metal film and realized 5 keV filter. Now, we are trying to construct band pass BSE image using image processing.