[9a-N403-1~11] 7.2 Applications and technologies of electron beams

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[9a-N403-5] Development of SE/BSE Detector arranged in a Dodecahedron

〇Yuto Yanagihara¹, Kazuhiro Kumagai^2,3, Yuanzhao Yao², Takashi Sekiguchi² (1.GPI, 2.Univ. of Tsukuba, 3.AIST)

Keywords:

microchannel plate,SEM,detector

In scanning electron microscopy (SEM), detectors with different energy sensitivities are placed at various positions to separately detect secondary electrons (SE) and backscattered electrons (BSE). We are developing a novel SEM detector that enables omnidirectional and full-energy-range detection of signal electrons by mounting microchannel plates (MCPs) with high-pass filters onto a dodecahedral frame. By combining the high-pass filters with signal processing, SE and BSE can be selectively extracted. Furthermore, by optimizing the specimen stage design, the system captures SE and BSE emitted in all directions.