[9a-N403-1~11] 7.2 Applications and technologies of electron beams

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[9a-N403-8] Electron Beam Shape Estimation in Scanning Electron Microscope

〇Yasunari Sohda¹, Michiru Tanaka¹ (1.Univ. of Tsukuba)

Keywords:

scanning electron microscope,image sharpness,beam Shape

We have been studying how to estimate the electron beam size in scanning electron microscope from image sharpness. In this study, for the purpose of obtaining information on the electron beam shape, we estimated the beam shape by assuming that the beam shape is a function convolving a Gaussian function and a Lorentz function. As a result, it was found that the width of the two functions changes with through-focusing, and this tendency may be caused by the optical aberration of the instrument.