[9a-P01-1~17] 6.2 Carbon-based thin films

[9a-P01-1] Depth Analysis of sp² Content in Hydrogenated Diamond-Like Carbon Films Using Ar Ion Etching

〇Yuichi Haruyama¹, Akira Heya², Koji Sumitomo², Seigo Ito², Mao Yotsumoto³, Takahiro Maruyama³ (1.LASTI Univ. of Hyogo, 2.Univ. of Hyogo, 3.Meijo Univ.)

Keywords:

diamond like carbon,photoelectron spectroscopy,depth analysis

The depth profile of the sp² content in the atomic hydrogen exposed hydrogenated diamond-like carbon (DLC) film was investigated by combining the Ar ion etching and the measurements of photoelectron spectroscopy spectra. In C 1s core-level photoelectron spectra of the DLC film, it was observed that the sp² content increased with increasing the Ar ion etching time. This means that the sp² content increased with depth from the surface. In addition, the sp² content of the DLC film was estimated by analyzing the photoelectron spectroscopy. In the presentation, the results of the depth analysis of the sp² content of the DLC film will be discussed, comparing them with the previous results of photoelectron spectroscopy, X-ray absorption spectroscopy, and Raman spectroscopy.