Presentation Information
[9a-P02-13]Direct Detection of High Energy Rays by Hybrid Detectors based on Ce:YAP Scintillator and TiO2Thin Film
〇Yuki Maruyama1, Marilou Cadatal-Raduban2,3, Kota Hibino1, Michal Kohout4, Kohei Yamanoi3, Carlito S. Ponseca Jr.5, Zdenek Hubicka4, Jiri Olejnicek4, Shingo Ono1 (1.Nagoya Institute of Technology, 2.Unitec Institute of Technology, 3.Osaka Univ., 4.Czech Academy of Sciences, 5.Gulf Univ.)
Keywords:
detector,scintillator,VUV
Deep ultraviolet (DUV) and vacuum ultraviolet (VUV) light with wavelengths ranging from 100 to 250 nm are applied in various fields, such as semiconductor substrate cleaning. To support technological development in this short-wavelength region, the development of suitable detectors is essential. In this study, we attempted to develop hybrid-type detectors by depositing TiO2 thin films on Ce:YAP scintillator substrates. We found that thermal treatment significantly enhanced the detector's photosensitivity.