Presentation Information

[9a-P03-1]A Study of the Fabrication of Superhydrophobic Aluminum Oxide Thin Films by Plasma Immersion Lattice Target Sputtering Method

Tsubasa Sano1, Yuuki Yamasaki1, Hazuo Watanabe1, 〇Masamichi Naitoh1, Tomonori Ikari2 (1.Kyushu Inst. of Tech., 2.NIT, Ube College)

Keywords:

Superhydrophobic film,PILTS method,Aluminum Oxide