Presentation Information
[9a-P04-6]Non-Destructive Soft Electric Contact Probe: Principles and Applications
〇Michiko Yoshitake1 (1.NIMS)
Keywords:
electric contact,non-destructive,use case
A soft probe where pressure to a specimen is kept within non-destructive range without control has been developed and patented. A standard model has already commercialized. The probe allows electric contact without destroying ultra-thin films or fragile specimens, and problems of evaporated electrode metal insertion into SAM films or porous materials can be avoided. Here, the principles, variations and examples of usage by users are presented.