[9a-S102-1~7] 17.1 Carbon nanotubes & other nanocarbon materials

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[9a-S102-2] High Responsivity Semiconducting CNT MEMS Bolometer by Structure Optimization

〇Tomo Tanaka¹, Masahiko Sano¹, Masataka Noguchi^1,2, Toshie Miyamoto^1,2, Megumi Kanaori², Ryota Yuge^1,2 (1.NEC Corp., 2.AIST)

Keywords:

carbon nanotube,MEMS,Infrared focal plane array